姓 名： 吕苗
地 址： 厦门大学萨本栋微米纳米科学技术研究院
电 话： 0592-2187163
传 真： 0592-2187163
电子邮件： lm@xmu.edu.cn
课题组主页：http://mnems.xmu.edu.cn
教育与科研经历
1992年 天津大学电子工程系，学士学位
1995年 河北半导体研究所，微电子学专业，硕士学位
2003年 西安电子科技大学, 微电子学与固体物理专业，博士学；
2001-2006.1 中国电子科技集团公司第十三研究所微米纳米中心副主任，教授级高工（2006）
2006.1 -2007.1 香港科技大学机械工程系，博士后
2007.2 - 2009.9, 明尼苏达大学机械工程系，博士后
2009.9 - 2011.7， 厦门大学萨本栋微纳米技术研究中心，教授
2011.8-至今 厦门大学萨本栋微米纳米科学技术研究院，教授，博士生导师
研究方向
纳米技术和柔性材料在MEMS传感器中的应用，生物检测和微型医疗器械
在研科研项目
现承担基金委仪器专项、科技部重大仪器专项子课题和福建省产研重大项目等，总经费超过500万元。
获奖情况
国防科学技术进步二等奖2次，国防科学技术进步三等奖3次，信息产业部科技进步二等奖1次。
代表性论文
1.Hongda Sun, ShengFeng Deng, Xiaobin Cui, Miao Lu, “Fabrication of microlens arrays with varied focal lengths on curved surfaces using electrostatic deformed template”. J. Micromech. Microeng. 24, 065008 (6pp), 2014
2.Yaqin Cheng, Hongda Sun, Xiaobin Cui, ShengFeng Deng, Miao Lu, “Combined optical dispersion by prism and arrayed waveguide grating with multiple diffraction orders for Raman spectrometer” Optics and Spectroscopy, 117, 3 pp. 480-485, 2014
3.Tun Wang, Liu Bin, Shusen Jiang, Hao Rong, Miao Lu, “A local bottom-gate structure with low parasitic capacitance for dielectrophoresis assembly and electrical characterization of suspended nanomaterials” , J. Micromech. Microeng. 24, 055025 (7pp) 2014
4.Hao Rong, Wei-Qing Lin, Jin-Cheng Zheng, Miao Lu，“Thermal characterization of a bridge-link carbon nanotubes array used as a thermal adhesive”International Journal of Adhesion & Adhesivespp.4958–63，2014
5.Zhao Wu，Qing-na Wang， Hong-da Sun and Miao Lu，“Shape-controllable polymeric microlens array duplicated by electrostatic force deformed template”，Optical Engineering 52(6)，063401，2013
6.Hao Rong, Baoming Wang, Lichao Sun, Huiqiong Wang, Miao Lu, “Fluidic aligned, dense SWNTs arrays as potential die adhesive and thermal interface material”, Soldering & Surface Mount Technology, 25(1), pp. 45-50，2013
7.Feng Zhu, Jiawei Yan, Miao Lu, Yongliang Zhou, Yang Yang and Bingwei Mao，“A strategy for selective detection based on interferent depleting and redox cycling using the plane-recessed microdisk array electrodes”， Electrochimica Acta 56，pp. 8101-8107, 2011.
8.Yang Yang, Jun-Yang Liu, Zhao-Bin Chen, Jing-Hua Tian, Xi Jin, Bo Liu, Xiulan Li, Zhong-Zi Luo, Miao Lu, Fang-Zu Yang, Nongjian Taoand Zhong-Qun Tian， “Conductance histogram evolution of an EC-MCBJ fabricated Au atomic point contact”, Nanotechnology, 22, 27, 275313, 2011
9.Yi Luo, Miao Lu, and Tianhong Cui “A Polymer-Based Bidirectional Micropump Driven by a PZT Bimorph”, Journal of Microsystem Technologies，17, 3, pp. 430-409, 2011
10.Miao Lu, Jijun Xiong and Tianhong Cui,“A Flexible Tri-Axis Contact Force Sensor for Tubular Medical Device Applications”J. Micromech. Microeng. 21, 035004 (8pp), 2011
11.Miao Lu, Xuekun Lu, Min-Woo Jang, Stephen A. Campbell, and Tianhong Cui，“Characterization of Carbon Nanotube Nanoswitches with Gigahertz Resonance Frequency and Low Pull-in Voltages Using Electrostatic Force Microscopy” J. Micromech. Microeng. 20, 105016 (7pp), 2010
12.Miao Lu, M-W. Jang, S. A. Campbell, T. H. Cui, “al”, Journal of Vacuum Science and Technology B 28(3), pp. 522-526, 2010
13.Miao Lu, Dongjin Lee, Taiho Yeomx, Tianhong Cui, “Micro Tactile Sensors with a Suspended and Oriented Single Walled Carbon Nanotube Beam Embedded in Polydimethylsiloxane Elastomer” Sensors Letters. Vol. 8, 639–644, 2010
14.Miao Lu, M-W. Jang, G. Haugstad, S. A. Campbell, T. H. Cui, “Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization” Appl. Phys. Lett.94, 261903,2009
15.Miao Lu, Dongjin Lee, Wei Xue,and Tianhong Cui “Flexible and Disposable Immunosensor based on Layer-by-Layer Self-Assembled Carbon Nanotubes and Biomolecules” Sensors & Actuators A , pp. 280-285, 2009
16. “Development of a MEMS-based RF low-phase-noise voltage controlled oscillator” 半导体学报, v 27, n 5, May, p 900-904 ,2006
17.Shan F Q, Lu Miao, Gao B X “Rectangular Increasing Distance Spiral Slots (RIDSS) PBG Applied to MEMS Frequency-Reconfigurable Antenna Design” Microwave and Optical Technology Letters Vol.47, Issue.4, page 394-395, 2005
18.R. H. Guo, Z. P. Zhao and Miao Lu, “Retention Model of Single-Electron Memory (SEM) Using Disintegration Theory” International Journal of Nonlinear Sciences and Numerical Simulation, 2005, v.6 n.4, 431-434.
19.Guo, Rong-Hui; Zhao, Zheng-Ping; Hao, Yue; Liu, Yu-Gui; Wu, Yi-Bin; Lu, Miao “Realization and Output Characteristics Analysis of the Multiple Islands Single-Electron Transistors “ 物理学报,v 54, n 4,April, 2005, p 1804-1808
20.Lu,shuhai; Luo, Rong; Yang, Yongjun; Lu, Miao; “Application of SDB technique in a MEMS accelerometer” 机械工程学报 2005, 12(s), 434-436
21.Luo, Rong; Xu, Aidong; Wang, Wei; Lu, Miao; “Realization of a rapid micro oscillating PCR chip机械工程学报 2005, 12(s), 88-90
22.Li, Qian; Zhao,Rihua; Lu,Miao; Hu, Xiaodong; “Design and realization of a low loss X-Band RF MEMS bandpass filter”机械工程学报 2005, 12(s), 231-234
23.Lin, Haifeng; Lu, Miao; Yang, Yongjun; Shi, Qian; En, Yunfei; “Reliability considerations and experiments of MEMS capacitive accelerometers”机械工程学报 2005, 12(s), 231-234
24.Lu Miao, Zhao Zhengping, Hu Xiaodong, Zou Xuefeng, Guo Hejun “Microelectromechanical System Switching Isolation Amplifier for Low Frequency Measurement” Journal of Microlithography, Microfabrication, and Microsystems, 2004, July, 467-471.
25.Lu miao, Zhao Zhengping, Lou Jianzhong, Gu Hongming, Hu Xiaodong, Li Qian “Thermal Effects and RF Power Handling of a DC-5GHz MEMS Switch” 半导体学报, 2004, 25(7), 749-755.英文版
26.Lou, Jianzhong; ; ; ; , “DC-to-32 GHz 2 bit MEMS phase shifter” 半导体学报, 2004, 25 (11) p 1386-1390
27.Gu, Hongming; Lu, Miao; Liang, chunguang; Gao Baoxing; “MEMS class E amplifier” 半导体学报, v 24, n 4, April, 2003, p 401-405
28.Lu Miao, Zhao Zhengping, Hu Xiaodong, Zou Xuefeng, Lin Haifeng and Guo Ronghui “Adaptive Contact for Improving the Behavior of Silicon MEMS Switches”. J. Micromech. Microeng. 2002, 12, 696-701.
29.Miao Lu, Yan-Jun Zhao, Xiao-Dong Hu, Xue-Feng Zou, Zheng-Ping Zhao, “Measurement of Adhesive Force between Micro Surfaces With a Novel Micro Leverage Structure” International Journal of Nonlinear Sciences and Numerical Simulation, 2002, 3(3), 419-422.
30.Xiao-Dong Hu, Jing Pan, Miao Lu, Xue-Feng Zou, Hai-Feng Lin, “Failure Mechanisms of a Micro Fabricated Relay” International Journal of Nonlinear Sciences and Numerical Simulation 2002, 3(3), 361-364.
31.Cui Tianhong, Zhou Zhaoying, Wang Xiaohao, Ye Xiongying, Yang Yue, Zhang Wendong, Lu Miao, Zhao Yanjun“Key Technologies of Thermally Actuated Silicon Micropump” 机械工程学报 1999, 35(1), 39-42
32.Yao Yahong, Gao Zhongyu, Lu Miao, Zhao Yongjun, Zhao Yanjun“Study on Fabrication of Micromechanical Inertial Instruments with Bulk Silicon Dissolved Wafer Process”: 清华大学学报 1998, 38(11), 12-15.
33.Yao Yahong; Zhao Yongjun; Lu Miao; Pi Shun; Li Jiang; Zhao Yanjun“High Aspect Ratio Trench Etching of Si using CCl2Fe2O2 Gas Mixture” 半导体学报1998, 19(7), 542-547.
e, Oct. 2001.
